Abstract:
Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever , as well as the position of the upper electrode has a direct impact on the natural frequency of the micro-actuator.
This research aims to study the amplitude of deflection in a micro-cantilever at different applied voltagesas well as different position of the upper electrode and determine the critical points of the applied voltage (pull-in voltage) for different position of the electrode pad on the cantilever at which the amplitude of deflection exceedone-third(1µm) of the total gap (3µm), Also aims to study the natural frequency for different length of electrode pad that cover the actuator layer. Finite element method, ANSYS was used as a simulation tool.
As a result the range of the applied voltage(pull-in voltage) that caused this cantileverreach the critical point for amplitude of deflection is (32mV-89mV) for different positions of the electrode pad as well as the natural frequency decrease related to increase the upper electrode length
