Compensating Frequency Change using DC Static Voltage On Electrostatic Actuator

Abstract

Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic actuator has a direct impact on frequency throughout the actuator. This research aims to study the compensating frequency by using pressure equivalent to thevalue of thedirect voltage through Electrostatic actuatorin a micro-cantilever. Finite element method, ANSYS, was used as a simulation tool