Abstract:
This thesis present a micro electromechanical system-inter digital transducer
(MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80MHz central
frequency on a 128° YX lithium-Nobelium tri-oxide(LiNbO3) wafer. The developed
MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line
oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and
the vibrating metallic dot at an anti node of the standing wave induces the second SAW
in the normal direction of its vibrating axis. The dual delay line oscillator detects the
Carioles effect (gyro phenomena) by comparing the resonant frequencies between two
oscillators through the interference effect. The coupling of k-wave MATLAB added tool
box modeling was used to extract the optimal design parameters prior to simulation. In
the electrical testing by the network analyzer, the simulated SAW resonator and delay
lines showed low insertion loss and similar operation frequencies between a resonator
and delay lines. When the device was rotated, the resonant frequency differences
between two oscillators linearly varied owing to the Carioles force. The obtained
sensitivity was approximately 119
1000
in the angular rate range of 0-
. Satisfactory linearity and superior directivity were also observed in the
test.