Abstract:
The Micro- Electro Mechanical systems ( MEMS) Switches are one of the technological applications of the Micro electro mechanical systems it has bright future in many different fields especially in ; space , microwave communication systems and radio frequency (RF) systems . The objective of this thesis is to design RF MEMS switches using MATLAB program. A design program was written in MATLAB. The interface between the user and MATLAB was made to enter design data.
The design compared with some models available in literature, and the results obtained by MATLAB matches other models in terms of the mechanical and electromechanical performance.
Three different materials Sic (silicon carbide), Au (Gold) and Sin (silicon Nitride) were used to design RF MEMS switch. The Sic showed superior performance compared to the other two materials. The best design was achieved using a beam fixed at ends, capacitive type switch single contact point and shunt connection. The obtained performance was low switching time (9.66 usec), isolation (25.74dB) for frequencies (0.1-60GHz), insertion loss (0.15dB) for frequencies (60-120GHz)) actuation voltage (36.79v) and power up to (27.06W) .
