EFFECT of COATING on RESIDUAL STRESSES in ELCTROSTATIC ACTUATOR MEMS DEVICE

Abstract

Constitute the pressures or stresses remaining one problems resulting from manufacturing may affect these stresses negatively on the performance of manufactured parts. These residual stress may be negative or positive, which is often generated as a result of the pains Due to difference in dimensions and the material distribution in the internal structure . one of the methods used to get rid of this stress is textured paint on the manufactured workpiece The important results in 0.01 μpa pressure applied on the workpiece which changed the frequency from 1209.5 μhz (natural frequency) to 3011.7 μhz , with A layer (thickness = 2.2194465μm) was added to the workpiece, the residual stresses were absorbed and the frequency reduced to 1208.5 μhz