Closed Loop Control of Micro-electro Mechanical System

Abstract

Micro-electro-mechanical system (MEMS) actuators are used in a wide variety of commercial, military and industrial products. Electrostatic, thermal, electromagnetic and piezoelectric mechanisms, due to scalability and fabrication simplicity, are used extensively for actuation in many applications that contains feedback controllers. The aim of this research is designing and simulating a closed loop control system for micro-electromechanical beam based on Matlab Simulink, in order to investigate the stability of the MEMS system with a variation of voltage to prove the stability of closed loop control for repetitive control of an electrostatic micro bridge actuator and the non-linear control of MEMS. The evaluation of performance done for one system based on their structures.