Position Control of a Micro Electro Mechanical Actuator By Using MATLAB And ANSYS

Abstract

Electrostatic actuators have a large effect in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic actuator has a direct impact in the displacement of the cantilever between the movable plate and fixed plate, which affects on the displacement of the movable plate of electrostatic actuator. This research aims to control this displacement (position)