Abstract:
Last decades, the importance of micro biomedical instrument has grown
at a rate even faster than in previous. This acceleration was primary due to
the increasing demand for high quality medical care in highly developed
countries, and also due expansion in MEMS technologies. MEMS based
micro gripper is one of the major focuses for many medical applications
such as microsurgery, micro assembling and testing of micro components,
and measuring properties of biological cells and small-scale tissue
manipulation.
This research presents electrostatically actuated cantilever beam used as
micro gripper in medical application. This electrostatic comb drive micro
gripper is designed using different materials (Si, SiO2, ,poly silicon ,Si3N4)
then analyzed the main characteristics of the micro gripper using a model
designed by finite elements method (ANSYS). In addition, the displacement
of gripper arms, stress in comb drive, and temperature that generated from
actuating were determined. Also the forces applied to the grasped object
were studied. Finally kinematics characterization of different analyzed
topologies of the micro gripper is discussed and couples of suggestion are
given to increase the accuracy of the design.
