Abstract:
X-ray fluorescence spectrometry imaging is a powerful tool to provide information about the chemical composition and elemental distribution of a specimen. X-ray fluorescence spectrometry images were conventionally obtained by using a μ-X-ray fluorescence spectrometry spectrometer, which requires scanning a sample. This work discusses technologies to be developed for high performance X-ray lenses, and advantages of refractive X-ray lenses over other X-ray optics. The need for smaller beam spot sizes for various applications and the unique properties of X-rays have induced a remarkable and fast development in X-ray optical systems. These systems are divided into three main categories: diffractive, reflective and refractive. Highlighting the properties that allow having spot sizes down to sub-micrometer regime. However, the extraordinary capabilities of such systems are always relative. Therefore, an overview of the techniques that use such optical systems will be given, emphasizing their applicability on several case studies. The instrument enabled highly sensitive X-ray fluorescence analysis. The operational characteristics of different models of micro-XRF spectrometers are considered; there highly detection limit of XRF will be achieved.
